Authors Juhan Ahn, Jeong-Kyu Kim, Sun-Woo Kim, Gwang-Sik Kim, Changhwan Shin, Jong-Kook Kim, Byung Jin Cho and Hyun-Yong Yu 
Journal/Conference IEEE Electron Device Letters 
Date Jun. 2016. 
volume vol. 37 
Number no. 6 
Page pp. 705-708 

Juhan Ahn, Jeong-Kyu Kim, Sun-Woo Kim, Gwang-Sik Kim, Changhwan Shin, Jong-Kook Kim, Byung Jin Cho and Hyun-Yong Yu, "Effect of Metal Nitride on Contact Resistivity of Metal-Interlayer-Ge Source/Drain in Sub-10 nm n-type Ge FinFET", IEEE Electron Device Letters, vol. 37, no. 6, pp. 705-708, Jun. 2016.