Authors Hyun Jun Ahn, Jungmin Moon, Yujin Seo, Tae In Lee, Choong Ki Kim, Hyun-Yong Yu, Wan Sik Hwang and Byung Jin Cho 
Journal/Conference IEEE Transactions on Electron Devices 
Date April. 2017. 
volume vol. 64 
Number no. 6 
Page pp. 2599-2603 

Hyun Jun Ahn, Jungmin Moon, Yujin Seo, Tae In Lee, Choong Ki Kim, Hyun-Yong Yu, Wan Sik Hwang and Byung Jin Cho, "Formation of Low-resistivity Nickel Germanide Using Atomic Layer Deposited Nickel Thin Film", IEEE Transactions on Electron Devices, vol. 64, no. 6, pp. 2599-2603, April. 2017.