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Equipment : Vacuum Probe Station

Model  :  MSTECH, M6VC

 

Application:

-IV, CV, RF, Impedance measurement
-Atmospheric & vacuum condition measurement
-Temperature controlled measurement

General information

-Chuck: 70 mm Dia, Triaxial Guide Cover
-Pressure range: 1 mTorr ~ 760mTorr
-Temperature range: 80 K ~ 570 K, 700 K

 

-Positioner: CV (2), IV (4)