4-point Probe.jpg

 

Equipment : 4-Point Probe

Model  :  CMT-SR1000N (AIT)

 

Application:

-Resistivity, sheet resistance measurement
-

General information

-Chuck: Wafer diameter 200 mm, square sample 140x140mm
-Measurement scale: Rs: 1mohm/sq ~ 2 Mohm/sq

Resistivity: 10uohm.cm ~ 200kohm.cm

 

-Measurment time: 2 ~ 4 sec.