3D surface profiler.png

Equipment : 3D Laser Scanning Microscope

Model  : VK-X250K (Kience)

 

Application:

1.Non-contact 3D surface measurement
2.Automatic analysis

- Film thickness measurement

- Surface roughness measurement

- Average step height measurement

General information

-Pinhole confocal optical system
-Photomultiplier & high-sensitivity 16-bit data capture
-Maximum scan speed : 120Hz
-Repeatability :
-Height : 40 nm(20×), 12 nm(50×), 12 nm(150×)
-Width : 100 nm(20×), 40 nm(50×), 20 nm(150×)

-Navigation system
-Automatic analysis tool