Authors Min Ju Kim, Kwanyong Pak, Wan Sik Hwang, Sung Gap Im, and Byung Jin Cho 
Journal/Conference ACS Applied Materials & Interfaces (Journal Cover) 
Date Oct. 2018 
volume 10 
Number 43 
Page 37326-37334 

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Novel Vapor-phase Synthesis of Flexible, Homogeneous Organic-Inorganic Hybrid Gate Dielectric with sub-5 nm Equivalent Oxide Thickness