Authors B. J. Cho, K. T. Kim, and C. K. Kim 
Journal/Conference J. Kor. Inst. Telematics. Electron. 
Date Jun. 1988. 
volume vol. 25 
Number no. 6 
Page pp. 647-653 

B. J. Cho, K. T. Kim, and C. K. Kim, "Temperature control and wafer temperature distribution simulation in RTA system", J. Kor. Inst. Telematics. Electron., vol. 25, no. 6, pp. 647-653, Jun. 1988.