Authors K. T. Kim, C. K. Kim, B. J. Cho, and J. G. Kim 
Journal/Conference J. Kor. Inst. Elect. Eng. 
Date Sep. 1988. 
volume vol. 1 
Number no. 2 
Page pp. 105-109 

K. T. Kim, C. K. Kim, B. J. Cho, and J. G. Kim, "Formation of shallow phosphorus layers by rapid thermal processing using a solid diffusion source", J. Kor. Inst. Elect. Eng., vol. 1, no. 2, pp. 105-109, Sep. 1988.