Authors B. J. Cho, P. Vandenabeele and K. Maex 
Journal/Conference IEEE Trans. Semicond. Manuf. 
Date Aug. 1994. 
volume vol. 7 
Number no. 3 
Page pp. 345-353 

B. J. Cho, P. Vandenabeele and K. Maex, "Development of a hexagonal shaped rapid thermal processor using a vertical tube", IEEE Trans. Semicond. Manuf., vol. 7, no. 3, pp. 345-353, Aug. 1994.