Authors J. G. Oh, K. H. Lee, B. J. Cho, and J. C. Kim 
Journal/Conference J. Kor. Appl. Phys. 
Date Jul. 1996. 
volume vol. 9 
Number no. 4 
Page pp. 506 

J. G. Oh, K. H. Lee, B. J. Cho, and J. C. Kim, "Shallow p+ -n junction formation by Ge pre-amorphization and additional RTA", J. Kor. Appl. Phys., vol. 9, no. 4, p. 506, Jul. 1996.