Authors S. A. Jang, Y. B. Kim, B. J. Cho, and J. C. Kim 
Journal/Conference J. Electrochem. Soc. 
Date Aug. 1997. 
volume vol. 144 
Number no. 8 
Page pp. 2933-2940 

S. A. Jang, Y. B. Kim, B. J. Cho, and J. C. Kim, "A mechanism of field-oxide-ungrowth phenomenon on recessed LOCOS isolation process and practical solution", J. Electrochem. Soc., vol. 144, no. 8, pp. 2933-2940, Aug. 1997.