Authors S. A. Jang, I. S. Yeo, Y. B. Kim, and B. J. Cho 
Journal/Conference Electrochem. Solid-State Lett 
Date Jul. 1998. 
volume vol. 1 
Number no. 1 
Page pp. 46-48 

S. A. Jang, I. S. Yeo, Y. B. Kim, and B. J. Cho, "Isolation process induced wafer warpage", Electrochem. Solid-State Lett., vol. 1, no. 1, pp. 46-48, Jul. 1998.