Authors P. F. Chong, B. J. Cho, E. F. Chor, M. S. Joo, and I. S. Yeo 
Journal/Conference Jpn. J. Appl. Phys. 
Date Apr. 2000. 
volume vol. 39 
Number no. 4B 
Page pp. 2181-2185 

P. F. Chong, B. J. Cho, E. F. Chor, M. S. Joo, and I. S. Yeo, "Investigation of reliability degradation of ultra-thin gate oxides irradiated under electron-beam lithography conditions", Jpn. J. Appl. Phys., vol. 39, no. 4B, pp. 2181-2185, Apr. 2000.