Authors C. C. Yeo, B. J. Cho, M. S. Joo, S. J. Whoang, and D. L. Kwong 
Journal/Conference Electrochem. and Solid-State Lett. 
Date Nov. 2003. 
volume vol. 6 
Number no. 11 
Page pp. F42-F44 

C. C. Yeo, B. J. Cho, M. S. Joo, S. J. Whoang, and D. L. Kwong, “Improvement of electrical properties of MOCVD HfO2 by multi-step deposition process”, Electrochem. and Solid-State Lett., vol. 6, no. 11, pp. F42-F44, Nov. 2003.