Authors C. H. Poon, L. S. Tan, B. J. Cho, A. See, and M. Bhat 
Journal/Conference J. Electrochem. Soc. 
Date Jan. 2004. 
volume vol. 151 
Number no. 1 
Page pp. G80-G83 

C. H. Poon, L. S. Tan, B. J. Cho, A. See, and M. Bhat, "Boron profile narrowing in laser processed silicon after rapid thermal anneal," J. Electrochem. Soc., vol. 151, no. 1, pp. G80-G83, Jan. 2004.