Authors M.Balasubramanian, L. K. Bera, S. Mathew, N. Balasubramanian, V. Lim, M. S. Joo, and B. J. Cho 
Journal/Conference Thin Solid Films 
Date Sep. 2004. 
volume vol. 462-463 
Page pp. 101-105 

M.Balasubramanian, L. K. Bera, S. Mathew, N. Balasubramanian, V. Lim, M. S. Joo, and B. J. Cho, "Wet etching characteristics and surface morphology evaluation of MOCVD grown HfO2 film," Thin Solid Films, vol. 462-463, pp. 101-105, Sep. 2004.