Authors C. C. Yeo, M. S. Joo, B. J. Cho, and S. J. Whoang 
Journal/Conference Thin Solid Films 
Date Sep. 2004. 
volume vol. 462-463 
Page pp. 90-95 

C. C. Yeo, M. S. Joo, B. J. Cho, and S. J. Whoang, "Effect of Annealing on the Composition and Structure of HfO2 and Nitrogen-Incorporated HfO2," Thin Solid Films, vol. 462-463, pp. 90-95, Sep. 2004.