Authors C. X. Zhu, B. J. Cho, and M. F. Li 
Journal/Conference Chemical Vapor Deposition 
Date 2006. 
volume vol. 12 
Number no. 2/3 
Page pp. 165-171 

C. X. Zhu, B. J. Cho, and M. F. Li, "Atomic-Layer-Deposited High-k Films and the Role in MIM Capacitors for Si RF/Analog IC Applications (Invited)," Chemical Vapor Deposition, vol. 12, no. 2/3, pp. 165-171, 2006.