Authors W. S. Hwang, B. J. Cho, D. S. H. Chan, and W. J. Yoo 
Journal/Conference J. Vacuum Sci. and Technol. -Section A 
Date Jul. 2007. 
volume vol. 25 
Number no. 4 
Page pp. 1056-1061 

W. S. Hwang, B. J. Cho, D. S. H. Chan, and W. J. Yoo, "Low energy N2 ion bombardment for removal of (HfO2)x(SiON)1-x in dilute HF", J. Vacuum Sci. and Technol. -Section A, vol. 25, no. 4, pp. 1056-1061, Jul. 2007.