Authors Chunxiang Zhu, B‐J Cho, M‐F Li 
Journal/Conference Chemical Vapor Deposition 
Date 2006. 
volume vol. 12 
Number no. 2-3 
Page pp. 165-171 
Chunxiang Zhu, B‐J Cho, M‐F Li, "Atomic Layer Deposited High-κ Films and Their Role in Metal-Insulator-Metal Capacitors for Si RF/Analog Integrated Circuit Applications", Chemical Vapor Deposition, vol. 12, no. 2-3, pp. 165-171, 2006.